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Analysis of defect structure in silicon. Silicon sheet growth development for the large area silicon sheet task of the Low-Cost Solar array Project

机译:硅中的缺陷结构分析。低成本太阳能电池阵列项目大面积硅片任务的硅片增长发展

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摘要

One hundred ninety-three silicon sheet samples, approximately 880 square centimeters, were analyzed for twin boundary density, dislocation pit density, and grain boundary length. One hundred fifteen of these samples were manufactured by a heat exchanger method, thirty-eight by edge defined film fed growth, twenty-three by the silicon on ceramics process, and ten by the dendritic web process. Seven solar cells were also step-etched to determine the internal defect distribution on these samples. Procedures were developed or the quantitative characterization of structural defects such as dislocation pits, precipitates, twin & grain boundaries using a QTM 720 quantitative image analyzing system interfaced with a PDP 11/03 mini computer. Characterization of the grain boundary length per unit area for polycrystalline samples was done by using the intercept method on an Olympus HBM Microscope.
机译:分析了约880平方厘米的193个硅片样品的孪晶边界密度,位错坑密度和晶界长度。这些样品中的115个是通过换热器方法制造的,其中38个是通过边沿限定的薄膜进料生长而制造的,23个是通过陶瓷上硅工艺制造的,而十三个是通过树枝状网状工艺制造的。还逐步蚀刻了七个太阳能电池,以确定这些样品上的内部缺陷分布。使用与PDP 11/03小型计算机连接的QTM 720定量图像分析系统,开发了程序或对结构缺陷(例如位错坑,沉淀,孪晶和晶界)进行了定量表征。通过在Olympus HBM显微镜上使用拦截方法对多晶样品的晶界长度进行表征。

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